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Combined electrical and spectroscopic investigation of thermal donor formation in plasma-hydrigenated n-type czochralski silicon

Date

2004
Meeting abstract
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dc.contributor.authorRafi, Joan Marc
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorUlyashin, Aliaksandr
dc.contributor.authorHuang, Y.L.
dc.contributor.authorJob, R.
dc.contributor.authorLauwaert, J.
dc.contributor.authorClauws, P.
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-15T15:43:58Z
dc.date.available2021-10-15T15:43:58Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9490
dc.source.beginpage74
dc.source.conferenceInternational Scientific Meeting Belgian Physical Society. Abstracts Book
dc.source.conferencedate25/06/2004
dc.source.conferencelocationMons Belgium
dc.title

Combined electrical and spectroscopic investigation of thermal donor formation in plasma-hydrigenated n-type czochralski silicon

dc.typeMeeting abstract
dspace.entity.typePublication
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