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Thin (2-4nm) medium and high-k dielectrica: a challenge for physical metrology
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1840 since deposited on 2021-10-14
3last month
Acq. date: 2025-12-15
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Metrics
Views
1840 since deposited on 2021-10-14
3last month
Acq. date: 2025-12-15
Citations