Publication:
Thin (2-4nm) medium and high-k dielectrica: a challenge for physical metrology
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-14T18:12:45Z | |
| dc.date.available | 2021-10-14T18:12:45Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5780 | |
| dc.source.conference | 31st European Solid-State Device Research Conference; 11-13 Sept. 2001; Nuremberg, Germany. | |
| dc.source.conferencelocation | ||
| dc.title | Thin (2-4nm) medium and high-k dielectrica: a challenge for physical metrology | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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