Publication:
Electromigration limits of copper nano-interconnects
| dc.contributor.author | Zahedmanesh, Houman | |
| dc.contributor.author | Varela Pedreira, Olalla | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.imecauthor | Zahedmanesh, Houman | |
| dc.contributor.imecauthor | Varela Pedreira, Olalla | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.date.accessioned | 2022-03-11T14:53:07Z | |
| dc.date.available | 2022-03-11T14:53:07Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/IRPS46558.2021.9405091 | |
| dc.identifier.eisbn | 978-1-7281-6893-7 | |
| dc.identifier.issn | 1541-7026 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39427 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Reliability Physics Symposium (IRPS) | |
| dc.source.conferencedate | MAR 21-24, 2021 | |
| dc.source.conferencelocation | Virtual | |
| dc.source.journal | na | |
| dc.source.numberofpages | 6 | |
| dc.title | Electromigration limits of copper nano-interconnects | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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