Publication:

An InGaAs/InP quantum well FinFET using the replacement fin process integrated in an RMG flow on 300mm Si substrates

Date

2014
Proceedings Paper
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Author(s)

Waldron, Niamh  
;
Merckling, Clement  
;
Guo, Weiming
;
Ong, Patrick  
;
Teugels, Lieve  
;
Ansar, Sheikh
;
Tsvetanova, Diana  
;
Sebaai, Farid  
;
van Dorp, Dennis  
;
Milenin, Alexey  
;
Lin, Dennis  
;
Nyns, Laura  
;
Mitard, Jerome  
;
Pourghaderi, Mohammad Ali
;
Douhard, Bastien  
;
Richard, Olivier  
;
Bender, Hugo  
;
Boccardi, Guillaume  
;
Caymax, Matty  
;
Heyns, Marc  
;
Vandervorst, Wilfried  
;
Barla, Kathy  
;
Collaert, Nadine  
;
Thean, Aaron  

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