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Device modeling of two-steps oxygen anneal-based submicron InGaZnO back-end-of-line field-effect transistor enabling short-channel effects suppression
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Device modeling of two-steps oxygen anneal-based submicron InGaZnO back-end-of-line field-effect transistor enabling short-channel effects suppression
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Date
2022
Journal article
https://doi.org/10.1038/s41598-022-23951-x
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kim, Donguk
;
Kim, Je-Hyuk
;
Choi, Woo Sik
;
Yang, Tae Jun
;
Jang, Jun Tae
;
Belmonte, Attilio
;
Rassoul, Nouredine
;
Subhechha, Subhali
;
Delhougne, Romain
;
Kar, Gouri Sankar
;
Lee, Wonsok
;
Cho, Min Hee
;
Ha, Daewon
;
Kim, Dae Hwan
Journal
SCIENTIFIC REPORTS
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334
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Acq. date: 2026-01-09
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since deposited on 2022-11-28
Acq. date: 2026-01-09
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Downloads
334
since deposited on 2022-11-28
35
last month
10
last week
Acq. date: 2026-01-09
Views
1426
since deposited on 2022-11-28
Acq. date: 2026-01-09
Citations