Publication:
EFTEM as a porosity metrology tool for low-k dielectrics
Date
| dc.contributor.author | Hens, S. | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Van Landuyt, J. | |
| dc.contributor.author | Iacopi, Francesca | |
| dc.contributor.author | Weidner, K. | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T21:45:56Z | |
| dc.date.available | 2021-10-14T21:45:56Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6381 | |
| dc.source.conference | Conference Book Joint Microscopy Meeting - JMM | |
| dc.source.conferencedate | 25/06/2002 | |
| dc.source.conferencelocation | Lille France | |
| dc.title | EFTEM as a porosity metrology tool for low-k dielectrics | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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