Publication:

Litho 1-litho 2 proximity differences for s LELE and LPLE double patterning processes

Date

2012
Proceedings Paper
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Author(s)

Wong, Patrick  
;
De Bisschop, Peter  
;
Vandenbroeck, Nadia  
;
Wiaux, Vincent  
;
Van de Kerkhove, Jeroen  
;
Robertson, Stewart
;
Biafore, John

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