Publication:

Deep UV lithography for planar photonic crystal structures

Date

2003-10

Proceedings Paper

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Author(s)

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;

Van Campenhout, Joris

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;

Wouters, Johan M. D.

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;

Taillaert, Dirk

;

Luyssaert, Bert

;

Van Thourhout, Dries

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Acq. date: 2026-02-24