Publication:

Deep UV lithography for planar photonic crystal structures

Date

2003-10
Proceedings Paper
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dc.contributor.authorBogaerts, Wim
dc.contributor.authorDumon, Pieter
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorWiaux, Vincent
dc.contributor.authorWouters, Johan M. D.
dc.contributor.authorBeckx, Stephan
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorLuyssaert, Bert
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorWouters, Johan M. D.
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-15T04:02:32Z
dc.date.available2021-10-15T04:02:32Z
dc.date.issued2003-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7231
dc.source.beginpage754
dc.source.conferenceProceedings 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society - LEOS
dc.source.conferencedate26/10/2003
dc.source.conferencelocationTucson, AZ USA
dc.source.endpage755
dc.title

Deep UV lithography for planar photonic crystal structures

dc.typeProceedings paper
dspace.entity.typePublication
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