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Articles
Creep resistant aluminum alloys for use in MEMS
Publication:
Creep resistant aluminum alloys for use in MEMS
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Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Modlinski, Robert
;
Witvrouw, Ann
;
Ratchev, Petar
;
Puers, Bob
;
De Wolf, Ingrid
Journal
J. of Micromechanics and Microengineering
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1921
since deposited on 2021-10-16
Acq. date: 2025-12-12
Citations
Metrics
Views
1921
since deposited on 2021-10-16
Acq. date: 2025-12-12
Citations