Publication:
Creep resistant aluminum alloys for use in MEMS
Date
| dc.contributor.author | Modlinski, Robert | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.author | Ratchev, Petar | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-16T03:28:35Z | |
| dc.date.available | 2021-10-16T03:28:35Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10894 | |
| dc.source.beginpage | S165 | |
| dc.source.endpage | S170 | |
| dc.source.issue | 7 | |
| dc.source.journal | J. of Micromechanics and Microengineering | |
| dc.source.volume | 15 | |
| dc.title | Creep resistant aluminum alloys for use in MEMS | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |