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Effective mobility in FinFET structures with HfO2 and SiON gate dielectrics and TaN gate electrode
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1919 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-07
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Metrics
Views
1919 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-07
Citations