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Challenges building a 22nm node 6T-SRAM cell using immersion lithography
Publication:
Challenges building a 22nm node 6T-SRAM cell using immersion lithography
Date
2009
Proceedings Paper
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18884.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ercken, Monique
;
Altamirano Sanchez, Efrain
;
Baerts, Christina
;
Brus, Stephan
;
De Backer, Johan
;
Demand, Marc
;
Delvaux, Christie
;
Horiguchi, Naoto
;
Locorotondo, Sabrina
;
Vandeweyer, Tom
;
Veloso, Anabela
;
Verhaegen, Staf
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Abstract
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2007
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
2007
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations