Publication:

Metal reliability mechanisms in Ruthenium interconnects

Date

2020
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Varela Pedreira, Olalla  
;
Stucchi, Michele  
;
Gupta, Anshul  
;
Vega Gonzalez, Victor  
;
van der Veen, Marleen  
;
Lariviere, Stephane  
;
Wilson, Chris  
;
Tokei, Zsolt  
;
Croes, Kristof  

Journal

na

Abstract

Description

Metrics

Views

1924 since deposited on 2021-11-02
4last month
Acq. date: 2025-12-15

Citations

Metrics

Views

1924 since deposited on 2021-11-02
4last month
Acq. date: 2025-12-15

Citations