Publication:

Metal reliability mechanisms in Ruthenium interconnects

Date

2020
Proceedings Paper
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dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorStucchi, Michele
dc.contributor.authorGupta, Anshul
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorLariviere, Stephane
dc.contributor.authorWilson, Chris
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCroes, Kristof
dc.contributor.imecauthorPedreira, O. Varela
dc.contributor.imecauthorStucchi, M.
dc.contributor.imecauthorGupta, A.
dc.contributor.imecauthorGonzalez, V. Vega
dc.contributor.imecauthorvan der Veen, M.
dc.contributor.imecauthorLariviere, S.
dc.contributor.imecauthorWilson, C. J.
dc.contributor.imecauthorTokei, Zs
dc.contributor.imecauthorCroes, K.
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorLariviere, Stephane
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.accessioned2021-11-22T09:26:00Z
dc.date.available2021-11-02T16:05:23Z
dc.date.available2021-11-22T09:26:00Z
dc.date.issued2020
dc.identifier.eisbn978-1-7281-3199-3
dc.identifier.issn1541-7026
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38211
dc.publisherIEEE
dc.source.conferenceIEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateAPR 28-MAY 30, 2020
dc.source.conferencelocationDallas, TX, USA
dc.source.journalna
dc.source.numberofpages7
dc.title

Metal reliability mechanisms in Ruthenium interconnects

dc.typeProceedings paper
dspace.entity.typePublication
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