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Integration of single damascene 85/85nm/L/S copper trenches in black diamond using 193nm optical lithography with dipole illumination
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1981 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-16
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Statistics
Views
1981 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-16
Citations