Publication:

Metal Etch Depth Metrology using YieldStar and CDSEM

Date

2024

Proceedings Paper

https://doi.org/10.1109/ASMC61125.2024.10545490

Simple item page Full metadata Statistics

Author(s)

;

;

van Haren, Richard

;

Truffert, Vincent

;

;

Goossens, Danny

;

Tamaddon, Amir-Hossein

Journal

N/A

Statistics

148 since deposited on 2024-07-31

1last month

1last week

Acq. date: 2026-04-25