Publication:
Sputtered tantalum as a structural materials for surface micromachined RF switches
Date
| dc.contributor.author | Sedky, Sherif | |
| dc.contributor.author | Fiorini, Paolo | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.author | Baert, Kris | |
| dc.date.accessioned | 2021-10-14T23:07:57Z | |
| dc.date.available | 2021-10-14T23:07:57Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6816 | |
| dc.source.beginpage | 89 | |
| dc.source.conference | BioMEMS and Bionanotechnology | |
| dc.source.conferencedate | 1/04/2002 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.source.endpage | 94 | |
| dc.title | Sputtered tantalum as a structural materials for surface micromachined RF switches | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |