Publication:

Nondestructive characterization of thin silicides using x-ray reflectivity

Date

2000

Journal article

Simple item page Full metadata Statistics

Files

4318.pdf 461.82 KB

Author(s)

Detavernier, C.

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;

Van Meirhaeghe, R. L.

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;

;

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Alves Donaton, Ricardo

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Journal

J. Vacuum Science and Technology A

Statistics

1950 since deposited on 2021-10-14

Acq. date: 2026-06-11