Publication:

Atom-probe for arsenic implant doped FinFET characterization

Date

2012
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dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorKumar, Arul
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-20T12:03:34Z
dc.date.available2021-10-20T12:03:34Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20898
dc.source.conference53rd International Field Emmission Symposium
dc.source.conferencedate21/05/2012
dc.source.conferencelocationTuscaloosa USA
dc.title

Atom-probe for arsenic implant doped FinFET characterization

dc.typeOral presentation
dspace.entity.typePublication
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