First demonstration of vertically-stacked gate-all-around highly-strained germanium nanowire p-FETs

Capogreco, Elena; Witters, Liesbeth; Arimura, Hiroaki; Sebaai, Farid; Porret, Clément; Hikavyy, Andriy; Loo, Roger; Milenin, Alexey; Eneman, Geert; Favia, Paola; Bender, Hugo; Wostyn, Kurt; Dentoni Litta, Eugenio; Schulze, Andreas; Vrancken, Christa; Opdebeeck, Ann; Mitard, Jerome; Langer, Robert; Holsteyns, Frank; Waldron, Niamh

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First demonstration of vertically-stacked gate-all-around highly-strained germanium nanowire p-FETs

Date

2018

Proceedings Paper

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Milenin, Alexey

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Eneman, Geert

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Favia, Paola

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Bender, Hugo

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Wostyn, Kurt

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Dentoni Litta, Eugenio

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1917 since deposited on 2021-10-25

Acq. date: 2026-06-25

First demonstration of vertically-stacked gate-all-around highly-strained germanium nanowire p-FETs

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