Publication:
First demonstration of vertically-stacked gate-all-around highly-strained germanium nanowire p-FETs
Date
| dc.contributor.author | Capogreco, Elena | |
| dc.contributor.author | Witters, Liesbeth | |
| dc.contributor.author | Arimura, Hiroaki | |
| dc.contributor.author | Sebaai, Farid | |
| dc.contributor.author | Porret, Clément | |
| dc.contributor.author | Hikavyy, Andriy | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Milenin, Alexey | |
| dc.contributor.author | Eneman, Geert | |
| dc.contributor.author | Favia, Paola | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Wostyn, Kurt | |
| dc.contributor.author | Dentoni Litta, Eugenio | |
| dc.contributor.author | Schulze, Andreas | |
| dc.contributor.author | Vrancken, Christa | |
| dc.contributor.author | Opdebeeck, Ann | |
| dc.contributor.author | Mitard, Jerome | |
| dc.contributor.author | Langer, Robert | |
| dc.contributor.author | Holsteyns, Frank | |
| dc.contributor.author | Waldron, Niamh | |
| dc.contributor.imecauthor | Capogreco, Elena | |
| dc.contributor.imecauthor | Witters, Liesbeth | |
| dc.contributor.imecauthor | Arimura, Hiroaki | |
| dc.contributor.imecauthor | Sebaai, Farid | |
| dc.contributor.imecauthor | Porret, Clément | |
| dc.contributor.imecauthor | Hikavyy, Andriy | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Milenin, Alexey | |
| dc.contributor.imecauthor | Eneman, Geert | |
| dc.contributor.imecauthor | Favia, Paola | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Wostyn, Kurt | |
| dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
| dc.contributor.imecauthor | Vrancken, Christa | |
| dc.contributor.imecauthor | Opdebeeck, Ann | |
| dc.contributor.imecauthor | Mitard, Jerome | |
| dc.contributor.imecauthor | Langer, Robert | |
| dc.contributor.imecauthor | Holsteyns, Frank | |
| dc.contributor.imecauthor | Waldron, Niamh | |
| dc.contributor.imecauthor | Barla, Kathy | |
| dc.contributor.orcidimec | Porret, Clément::0000-0002-4561-348X | |
| dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.contributor.orcidimec | Milenin, Alexey::0000-0003-0747-0462 | |
| dc.contributor.orcidimec | Eneman, Geert::0000-0002-5849-3384 | |
| dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
| dc.contributor.orcidimec | Wostyn, Kurt::0000-0003-3995-0292 | |
| dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
| dc.contributor.orcidimec | Langer, Robert::0000-0002-1132-3468 | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.date.accessioned | 2021-10-25T17:02:32Z | |
| dc.date.available | 2021-10-25T17:02:32Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30358 | |
| dc.identifier.url | https://ieeexplore.ieee.org/document/8510645 | |
| dc.source.beginpage | 193 | |
| dc.source.conference | IEEE Symposium on VLSI Technology | |
| dc.source.conferencedate | 18/06/2018 | |
| dc.source.conferencelocation | Honolulu, HI USA | |
| dc.source.endpage | 194 | |
| dc.title | First demonstration of vertically-stacked gate-all-around highly-strained germanium nanowire p-FETs | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: | ||