Publication:
MIS or MS? Source/drain contact scheme evaluation for 7nm Si CMOS technology and beyond
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1817 since deposited on 2021-10-23
3last month
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Acq. date: 2026-10-12
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Statistics
Views
1817 since deposited on 2021-10-23
3last month
1last week
Acq. date: 2026-10-12
Citations