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Towards atomic-layer-scale processing of high mobility channel materials in acidic solutions for N5 and N7 technology nodes
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Towards atomic-layer-scale processing of high mobility channel materials in acidic solutions for N5 and N7 technology nodes
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Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van Dorp, Dennis
;
Arnauts, Sophia
;
Abrenica, Graniel
;
Holsteyns, Frank
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2025
since deposited on 2021-10-23
Acq. date: 2025-12-15
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Views
2025
since deposited on 2021-10-23
Acq. date: 2025-12-15
Citations