Publication:
Analysis of the interface trap density in SOI FinFETs with different TiN gate electrode thickness through charge pumping technique
Date
| dc.contributor.author | Rodrigues, Michele | |
| dc.contributor.author | Cho, Moon Ju | |
| dc.contributor.author | Martino, J.A. | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.author | Mercha, Abdelkarim | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.imecauthor | Mercha, Abdelkarim | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.contributor.orcidimec | Mercha, Abdelkarim::0000-0002-2174-6958 | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-18T02:19:15Z | |
| dc.date.available | 2021-10-18T02:19:15Z | |
| dc.date.issued | 2009-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16113 | |
| dc.source.beginpage | 559 | |
| dc.source.conference | 24th Symposium on Microelectronics Technology and Devices - SBMicro | |
| dc.source.conferencedate | 31/08/2009 | |
| dc.source.conferencelocation | Natal Brazil | |
| dc.source.endpage | 565 | |
| dc.title | Analysis of the interface trap density in SOI FinFETs with different TiN gate electrode thickness through charge pumping technique | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |