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Articles
Post-ion beam induced degradation of copper layers in transmission electron microscopy specimens
Publication:
Post-ion beam induced degradation of copper layers in transmission electron microscopy specimens
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Date
2015
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31290.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Seidel, Felix
;
Richard, Olivier
;
Bender, Hugo
;
Vandervorst, Wilfried
Journal
Semiconductor Science and Technology
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1890
since deposited on 2021-10-22
Acq. date: 2025-12-15
Citations
Metrics
Views
1890
since deposited on 2021-10-22
Acq. date: 2025-12-15
Citations