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Impact of millisecond laser anneal on the thermal stress-induced defect creation in Si1-xGex source/drain junctions
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Impact of millisecond laser anneal on the thermal stress-induced defect creation in Si1-xGex source/drain junctions
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Date
2008
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16944.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bargallo Gonzalez, Mireia
;
Simoen, Eddy
;
Rosseel, Erik
;
Verheyen, Peter
;
Hoffmann, Thomas Y.
;
Loo, Roger
;
Absil, Philippe
;
Claeys, Cor
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1806
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations
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Views
1806
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations