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Optimized EUV mask absorber stack for improved imaging by reducing roughness and crystallinity of alternative absorber materials
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1941 since deposited on 2021-10-23
4last month
Acq. date: 2026-04-26
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Statistics
Views
1941 since deposited on 2021-10-23
4last month
Acq. date: 2026-04-26
Citations