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Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric
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1884 since deposited on 2021-10-16
6last month
Acq. date: 2026-01-25
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Statistics
Views
1884 since deposited on 2021-10-16
6last month
Acq. date: 2026-01-25
Citations