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Spectroscopic ellipsometry and ellipsometric porosimetry studies of CVD low-k dielectric films

Date

2008
Journal article
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dc.contributor.authorMarsik, Premysl
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorSchneider, Dieter
dc.contributor.authorDe Roest, David
dc.contributor.authorKaneko, Shinya
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorDe Roest, David
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned2021-10-17T08:50:08Z
dc.date.available2021-10-17T08:50:08Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn1610-1634
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14127
dc.source.beginpage1253
dc.source.endpage1256
dc.source.issue5
dc.source.journalPhysica Status Solidi C
dc.source.volume5
dc.title

Spectroscopic ellipsometry and ellipsometric porosimetry studies of CVD low-k dielectric films

dc.typeJournal article
dspace.entity.typePublication
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