Publication:
Growth Kinetics, Electrical Characterization and Reliability Study of sub-5 nm Gate Dielectrics
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1994 since deposited on 2021-10-14
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Acq. date: 2026-01-06
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1994 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2026-01-06
Citations