Publication:
Growth Kinetics, Electrical Characterization and Reliability Study of sub-5 nm Gate Dielectrics
Date
| dc.contributor.author | Nigam, Tanya | |
| dc.date.accessioned | 2021-10-14T11:31:44Z | |
| dc.date.available | 2021-10-14T11:31:44Z | |
| dc.date.issued | 1999-05 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3702 | |
| dc.title | Growth Kinetics, Electrical Characterization and Reliability Study of sub-5 nm Gate Dielectrics | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
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