Publication:

Low-frequency noise measurements for electromigration characterization in BEOL interconnects

Date

2019
Proceedings Paper
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dc.contributor.authorBeyne, Sofie
dc.contributor.authorCroes, Kristof
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorArnoldi, Laurent
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorBeyne, Sofie
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-27T07:34:02Z
dc.date.available2021-10-27T07:34:02Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32536
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8989897
dc.source.beginpage1
dc.source.conference2019 IEEE International Integrated Reliability Workshop (IIRW)
dc.source.conferencedate13/10/2019
dc.source.conferencelocationSouth Lake Tahoe, CA USA
dc.source.endpage9
dc.title

Low-frequency noise measurements for electromigration characterization in BEOL interconnects

dc.typeProceedings paper
dspace.entity.typePublication
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