Publication:

Critical In-Line OCD Metrology for CFET Manufacturing

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3051718

Simple item page Full metadata Statistics

Author(s)

;

;

Urbanowicz, Adam Michal

;

;

;

;

;

;

Bogdanowicz, Janusz

;

Melhem, Stephanie

;

;

Siew, Yong Kong

;

Basu, Debashish

;

Charley, Anne-Laure

;

Reifsnider, Jason

;

Horiguchi, Naoto

;

Leray, Philippe

Journal

Proceedings of SPIE

Statistics

131 since deposited on 2025-07-28

27last month

7last week

Acq. date: 2026-10-08