Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Design and Mask Optimization Toward Low Dose EUV Exposure
Publication:
Design and Mask Optimization Toward Low Dose EUV Exposure
Copy permalink
Date
2022-05-26
Proceedings Paper
https://doi.org/10.1117/12.2614268
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
120520C.pdf
7.17 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Xu, Dongbo
;
Gillijns, Werner
;
Kim, Ryan Ryoung han
Journal
SPIE Conference proceedings
Abstract
Description
Metrics
Downloads
223
since deposited on 2022-09-16
22
last month
4
last week
Acq. date: 2025-12-11
Views
1546
since deposited on 2022-09-16
Acq. date: 2025-12-11
Citations
Metrics
Downloads
223
since deposited on 2022-09-16
22
last month
4
last week
Acq. date: 2025-12-11
Views
1546
since deposited on 2022-09-16
Acq. date: 2025-12-11
Citations