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Conference contributions
Design and Mask Optimization Toward Low Dose EUV Exposure
Publication:
Design and Mask Optimization Toward Low Dose EUV Exposure
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Date
2022-05-26
Proceedings Paper
https://doi.org/10.1117/12.2614268
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120520C.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Xu, Dongbo
;
Gillijns, Werner
;
Kim, Ryan Ryoung han
Journal
SPIE Conference proceedings
Abstract
Description
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since deposited on 2022-09-16
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Statistics
Downloads
279
since deposited on 2022-09-16
18
last month
2
last week
Acq. date: 2026-02-25
Views
1547
since deposited on 2022-09-16
Acq. date: 2026-02-25
Citations