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Prediction of the influence of induced stresses in silicon on CMOS Performance in a Cu-through-via interconnect technology
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1957 since deposited on 2021-10-16
3last month
Acq. date: 2025-12-11
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Metrics
Views
1957 since deposited on 2021-10-16
3last month
Acq. date: 2025-12-11
Citations