Publication:

High hole-mobility 65nm biaxially-strained Ge-pFETs: fabrication, analysis and optimization

Date

2010
Proceedings Paper
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Author(s)

Mitard, Jerome  
;
De Jaeger, Brice  
;
Eneman, Geert  
;
Dobbie, Andrew
;
Myronov, M.
;
Kobayashi, Masaharu
;
Geypen, Jef  
;
Bender, Hugo  
;
Vincent, Benjamin  
;
Krom, Raymond
;
Franco, Jacopo  
;
Winderickx, Gillis  
;
Vrancken, Evi  
;
Vanherle, Wendy  
;
Wang, Wei-E
;
Tseng, Joshua
;
Loo, Roger  
;
De Meyer, Kristin  
;
Caymax, Matty  
;
Pantisano, Luigi
;
Leadley, David
;
Meuris, Marc  
;
Absil, Philippe  
;
Biesemans, Serge  
;
Hoffmann, Thomas Y.

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