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Comparison of electric properties of ultra-thin thermal and plasma nitrided silicon oxides with different post-deposition treatments using C-AFM
Publication:
Comparison of electric properties of ultra-thin thermal and plasma nitrided silicon oxides with different post-deposition treatments using C-AFM
Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Polspoel, Wouter
;
Vandervorst, Wilfried
;
Petry, Jasmine
;
Conard, Thierry
;
Benedetti, Alessandro
Journal
Microelectronic Engineering
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1912
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1912
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations