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Comparison of electric properties of ultra-thin thermal and plasma nitrided silicon oxides with different post-deposition treatments using C-AFM

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1917 since deposited on 2021-10-16
2last month
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Acq. date: 2026-02-27

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1917 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-02-27

Citations