Spacers alternatives for integration of 3D stacked SBT FeCAPs

Lisoni, Judit; Johnson, J.; Everaert, Jean-Luc; Paraschiv, Vasile; Boullart, Werner; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, Emma; Monchoix, Hervé; Van Autryve, Luc

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Spacers alternatives for integration of 3D stacked SBT FeCAPs

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2003

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Integrated Ferroelectrics

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1992 since deposited on 2021-10-15

Acq. date: 2026-06-14

Spacers alternatives for integration of 3D stacked SBT FeCAPs

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