Publication:

Spacers alternatives for integration of 3D stacked SBT FeCAPs

Date

2003
Journal article
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Author(s)

Lisoni, Judit
;
Johnson, J.
;
Everaert, Jean-Luc
;
Paraschiv, Vasile  
;
Boullart, Werner  
;
Maes, David
;
Haspeslagh, Luc  
;
Wouters, Dirk
;
Caputa, Concetta
;
Casella, P.
;
Zambrano, R.
;
Vecchio, Emma  
;
Monchoix, Hervé
;
Van Autryve, Luc  

Journal

Integrated Ferroelectrics

Abstract

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