Publication:
Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence SiGe
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1877 since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations
Metrics
Views
1877 since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations