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Oxygen beam interactions during sputter profiling of Si, SiGe and Ge substrates
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Oxygen beam interactions during sputter profiling of Si, SiGe and Ge substrates
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Date
2006-12-06
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Huyghebaert, Cedric
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since deposited on 2026-05-04
Acq. date: 2026-05-16
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Views
2
since deposited on 2026-05-04
Acq. date: 2026-05-16
Citations