Publication:
Oxygen beam interactions during sputter profiling of Si, SiGe and Ge substrates
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0001-6043-7130 | |
| cris.virtualsource.department | 89fd7cdc-3a0e-402d-9d68-8aafcb4eee4e | |
| cris.virtualsource.orcid | 89fd7cdc-3a0e-402d-9d68-8aafcb4eee4e | |
| dc.contributor.advisor | Vantomme, André | |
| dc.contributor.advisor | Vandervorst, Wilfried | |
| dc.contributor.author | Huyghebaert, Cedric | |
| dc.date.accessioned | 2026-05-04T14:42:32Z | |
| dc.date.available | 2026-05-04T14:42:32Z | |
| dc.date.issued | 2006-12-06 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/59311 | |
| dc.provenance.editstepuser | meghan.oneill@imec.be | |
| dc.title | Oxygen beam interactions during sputter profiling of Si, SiGe and Ge substrates | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |