Publication:
The influence of wafer soaking and top coat processing on resist profile control in immersion lithography
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1827 since deposited on 2021-10-16
2last month
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Acq. date: 2026-08-08
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Statistics
Views
1827 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-08-08
Citations