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Measurement and simulation of boron diffusion in strained Si1-xGex epitaxial layers with linearly graded germanium profile

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1915 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-15

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1915 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-15

Citations