Measurement and simulation of boron diffusion in strained Si1-xGex epitaxial layers with linearly graded germanium profile

Publication:

2000

Proceedings Paper

Author(s)

Krishnasamy, Rajendran

;

Schoenmaker, Wim

1920 since deposited on 2021-10-14

2last month

Acq. date: 2026-10-13