Publication:
Measurement and simulation of boron diffusion in strained Si1-xGex epitaxial layers with linearly graded germanium profile
Date
| dc.contributor.author | Krishnasamy, Rajendran | |
| dc.contributor.author | Schoenmaker, Wim | |
| dc.date.accessioned | 2021-10-14T13:37:38Z | |
| dc.date.available | 2021-10-14T13:37:38Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4684 | |
| dc.source.conference | Proceedings of ICCCD | |
| dc.source.conferencedate | 15/12/2000 | |
| dc.source.conferencelocation | karagpur India | |
| dc.title | Measurement and simulation of boron diffusion in strained Si1-xGex epitaxial layers with linearly graded germanium profile | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |