Publication:

Flexible and robust capping-metal gate integration technology enabling multiple-VT CMOS in MuGFETs

Date

2008
Proceedings Paper
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Author(s)

Veloso, Anabela  
;
Witters, Liesbeth  
;
Demand, Marc  
;
Ferain, Isabelle
;
Son, Nak-Jim
;
Kaczer, Ben  
;
Roussel, Philippe  
;
Simoen, Eddy  
;
Kauerauf, Thomas
;
Adelmann, Christoph  
;
Brus, Stephan  
;
Richard, Olivier  
;
Bender, Hugo  
;
Conard, Thierry  
;
Vos, Rita  
;
Rooyackers, Rita
;
Van Elshocht, Sven  
;
Collaert, Nadine  
;
De Meyer, Kristin  
;
Biesemans, Serge  
;
Jurczak, Gosia  

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