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Flexible and robust capping-metal gate integration technology enabling multiple-VT CMOS in MuGFETs

Date

2008
Proceedings Paper
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dc.contributor.authorVeloso, Anabela
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorDemand, Marc
dc.contributor.authorFerain, Isabelle
dc.contributor.authorSon, Nak-Jim
dc.contributor.authorKaczer, Ben
dc.contributor.authorRoussel, Philippe
dc.contributor.authorSimoen, Eddy
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorBrus, Stephan
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorConard, Thierry
dc.contributor.authorVos, Rita
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorCollaert, Nadine
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorBiesemans, Serge
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-17T12:25:30Z
dc.date.available2021-10-17T12:25:30Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14734
dc.source.beginpage14
dc.source.conferenceSymposium on VLSI Technology Digest of Technical Papers
dc.source.conferencedate17/06/2008
dc.source.conferencelocationHonolulu, HI USA
dc.source.endpage15
dc.title

Flexible and robust capping-metal gate integration technology enabling multiple-VT CMOS in MuGFETs

dc.typeProceedings paper
dspace.entity.typePublication
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