Publication:

A new ultra-thin 3D integration technique: technological and thermal investigations

Date

2000
Proceedings Paper
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18783.pdf 2.2 MB

Author(s)

Pinel, Stephane
;
Tasselli, Josiane
;
Marty, Antoine
;
Bailbe, Jean-Pierre
;
Beyne, Eric  
;
Van Hoof, Rita  
;
Marco, Santiago
;
Leseduarte, Sergio
;
Vendier, Olivier
;
Coello Vera, Augustin

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