Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits
Publication:
Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits
Date
2016-11
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Karageorgos, Ioannis
;
Ryckaert, Julien
;
Gronheid, Roel
;
Tung, Maryann C.
;
Wong, H.-S. Philip
;
Karageorgos, Evangelos
;
Croes, Kris
;
Bekaert, Joost
;
Vandenberghe, Geert
;
Stucchi, Michele
;
Dehaene, Wim
Journal
Journal of Micro/Nanolithography MEMS and MOEMS
Abstract
Description
Metrics
Views
1921
since deposited on 2021-10-23
428
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1921
since deposited on 2021-10-23
428
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations